A self-limited atomic layer deposition of WS₂ based on the chemisorption and reduction of bis(t-butylimido)bis(dimethylamino) complexes

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  • A self-limited atomic layer deposition of WS₂ based on the chemisorption and reduction of bis(t-butylimido)bis(dimethylamino) complexes

A self-limited atomic layer deposition of WS₂ based on the chemisorption and reduction of bis(t-butylimido)bis(dimethylamino) complexes